A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges V Vahedi, M Surendra Computer Physics Communications 87 (1-2), 179-198, 1995 | 1300 | 1995 |
Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching JJ Brown, SV Deshpande, DV Horak, M Surendra, LY Tsou, Q Yang, C Yu, ... US Patent 6,864,041, 2005 | 447 | 2005 |
Self-consistent model of a direct-current glow discharge: Treatment of fast electrons M Surendra, DB Graves, GM Jellum Physical Review A 41 (2), 1112, 1990 | 385 | 1990 |
Particle simulations of radio-frequency glow discharges M Surendra, DB Graves IEEE transactions on plasma science 19 (2), 144-157, 1991 | 332 | 1991 |
Methods and apparatus for managing computing deployment in presence of variable workload DW Coleman, SE Froehlich, JL Hellerstein, LS Hsiung, ER Lassettre, ... US Patent 7,350,186, 2008 | 218 | 2008 |
Capacitively coupled glow discharges at frequencies above 13.56 MHz M Surendra, DB Graves Applied physics letters 59 (17), 2091-2093, 1991 | 208 | 1991 |
Closed air gap interconnect structure KL Saenger, M Surendra, SV Nitta, S Purushothaman, ME Colburn, ... US Patent 7,361,991, 2008 | 186* | 2008 |
Adaptive self-tuning memory in DB2 AJ Storm, C Garcia-Arellano, SS Lightstone, Y Diao, M Surendra Proceedings of the 32nd international conference on Very large data bases …, 2006 | 186 | 2006 |
Electron heating in low‐pressure rf glow discharges M Surendra, DB Graves, IJ Morey Applied physics letters 56 (11), 1022-1024, 1990 | 181 | 1990 |
Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges M Surendra, DB Graves Physical review letters 66 (11), 1469, 1991 | 129 | 1991 |
Radiofrequency discharge benchmark model comparison M Surendra Plasma Sources Science and Technology 4 (1), 56, 1995 | 128 | 1995 |
Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with Monte Carlo collisions technique M Surendra, M Dalvie Physical Review E 48 (5), 3914, 1993 | 103 | 1993 |
Fluorocarbon high density plasma. VI. Reactive ion etching lag model for contact hole silicon dioxide etching in an electron cyclotron resonance plasma O Joubert, GS Oehrlein, M Surendra Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 12 (3 …, 1994 | 100 | 1994 |
Methods and apparatus for performing adaptive and robust prediction SE Froehlich, JL Hellerstein, ER Lassettre, TW Mummert, M Surendra US Patent 7,039,559, 2006 | 98 | 2006 |
User configurable multivariate time series reduction tool control method RJ Bunkofske, JZ Colt Jr, JJ McGill, NT Pascoe, M Surendra, ... US Patent 6,442,445, 2002 | 94 | 2002 |
Systems and methods for providing constrained optimization using adaptive regulatory control Y Diao, CM Garcia-Arellano, JL Hellerstein, SS Lightstone, SS Parekh, ... US Patent 7,346,401, 2008 | 87 | 2008 |
Using MIMO linear control for load balancing in computing systems Y Diao, JL Hellerstein, AJ Storm, M Surendra, S Lightstone, S Parekh, ... Proceedings of the 2004 American Control Conference 3, 2045-2050, 2004 | 77 | 2004 |
Controlling quality of service in multi-tier web applications Y Diao, JL Hellerstein, S Parekh, H Shaikh, M Surendra 26th IEEE International Conference on Distributed Computing Systems (ICDCS …, 2006 | 75 | 2006 |
Self‐consistent dc glow‐discharge simulations applied to diamond film deposition reactors M Surendra, DB Graves, LS Plano Journal of applied physics 71 (10), 5189-5198, 1992 | 71 | 1992 |
Methods and systems for control discovery in computing systems Y Diao, FN Eskesen, SE Froehlich, JL Hellerstein, A Keller, ... US Patent 7,565,655, 2009 | 63 | 2009 |