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Shawn Tanner
Shawn Tanner
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Title
Cited by
Cited by
Year
Piezoelectric aluminum nitride nanoelectromechanical actuators
N Sinha, GE Wabiszewski, R Mahameed, VV Felmetsger, SM Tanner, ...
Applied Physics Letters 95 (5), 2009
1922009
Method and system for reducing thermal protrusion of an NFT
SM Tanner, Y Hu
US Patent 8,565,049, 2013
1622013
Method and system for providing an NFT using a sacrificial NFT structure
SM Tanner, Y Hu, U Tran, Z Wang
US Patent 8,491,801, 2013
1592013
Method and system for providing an energy assisted magnetic recording writer having a heat sink and NFT
Z Wang, W Gao, SM Tanner, M Abatchev, Y Chen, Y Hu
US Patent 8,721,902, 2014
1582014
High-Q GaN nanowire resonators and oscillators
SM Tanner, JM Gray, CT Rogers, KA Bertness, NA Sanford
Applied Physics Letters 91 (20), 2007
1562007
System and method for fabricating a magnetic recording pole
L Ji, M Jiang, JS Marcelino, SM Tanner, D Wan, TYW Jiang
US Patent 8,625,233, 2014
1502014
Structure and method to measure waveguide power absorption by surface plasmon element
SM Tanner, Y Hu, U Tran, Z Wang, Z Shi, S Sochava
US Patent 8,749,790, 2014
1372014
Methods and apparatuses for performing wafer level characterization of a plasmon element
SM Tanner, Y Hu, S Sochava
US Patent 8,753,903, 2014
1332014
Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films
VV Felmetsger, PN Laptev, SM Tanner
Journal of Vacuum Science & Technology A 27 (3), 417-422, 2009
432009
Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering
SM Tanner, VV Felmetsger
Journal of Vacuum Science & Technology A 28 (1), 69-76, 2010
332010
Bi-layer NFT-core spacer for EAMR system and method of making the same
Z Wang, H Yuan, SM Tanner, Y Hu
US Patent 8,773,956, 2014
322014
Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering
VV Felmetsger, PN Laptev, SM Tanner
Surface and Coatings Technology 204 (6-7), 840-844, 2009
272009
Ultra thin AlN piezoelectric nano-actuators
N Sinha, GE Wabiszewski, R Mahameed, VV Felmetsger, SM Tanner, ...
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
222009
Crystal orientation and stress in ac reactively sputtered AlN films on Mo electrodes for electro-acoustic devices
VV Felmetsger, PN Laptev, SM Tanner
2008 IEEE Ultrasonics Symposium, 2146-2149, 2008
202008
Method and system for providing an energy assisted magnetic recording writer having a self aligned heat sink and NFT
Y Hu, SM Tanner, U Tran, Z Wang, M Abatchev
US Patent 8,834,728, 2014
82014
Heat assisted magnetic recording head having near-field transducer with a sloped nose
SM Tanner, M Yu, M Zheng, K Lee, TY Chen
US Patent 10,106,885, 2018
52018
Microstructure of piezoelectric AlN films deposited by AC reactive sputtering
SM Tanner, VV Felmetsger
2009 IEEE International Ultrasonics Symposium, 1691-1694, 2009
32009
Fabrication process for cantilevers with integrated tunnel junctions
SM Tanner, CT Rogers
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
32008
Method for providing heat assisted magnetic recording write apparatus having a near-field transducer with a sloped nose
SM Tanner, M Yu, M Zheng, K Lee, TY Chen
US Patent 9,786,304, 2017
22017
Method for providing a structure having reduced voids in a magnetic recording transducer
Y Hu, U Tran, SM Tanner, JS Marcelino, Z Jikou
US Patent 9,087,542, 2015
2015
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